Mpx10 Sensor De Presion Diferencial

Pressure

Freescale Semiconductor

MPX10
Rev 14, 10/2008

+

10 kPa Uncompensated
Silicon Pressure Sensors
The MPX10 series silicon piezoresistive pressure sensors provide a very
accurate and linear voltage output, directly proportional to the applied
pressure. These standard, low cost, uncompensated sensors permit
manufacturers to design and add their own external temperaturecompensation and signal conditioning networks. Compensation techniques
are simplified because of the predictability of Freescale's single element
strain gauge design.

Features
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Low Cost
Patented Silicon Shear Stress Strain Gauge Design
Ratiometric to Supply Voltage
Differential and Gauge Options
Durable Epoxy Unibody Element or Thermoplastic (PPS) Surface Mount
PackageMPX10
Series
0 to 10 kPa (0 to 1.45 psi)
35 mV Full Scale Span
(Typical)

Application Examples
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Air Movement Control
Environmental Control Systems
Level Indicators
Leak Detection
Medical Instrumentation
Industrial Controls
Pneumatic Control Systems
Robotics

ORDERING INFORMATION
Package
Case
Device Name
Options
No.
None
Unibody Package (MPX10 Series)MPX10D
Tray
344
•
MPX10DP
Tray
344C
MPX10GP
Tray
344B
Small Outline Package (MPXV10G Series)
MPXV10GC6U
Rail
482A
MPXV10GC7U
Rail
482C

# of Ports
Single

Dual

Gauge

MPXV10GC7U
CASE 482C-03

Absolute

Device
Marking

•

•

MPX10D
MPX10DP
MPX10GP

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•

•
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MPXV10G
MPXV10G

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UNIBODY PACKAGE

SMALL OUTLINE PACKAGE

MPXV10GC6U
CASE482A-01

Pressure Type
Differential

MPX10D
CASE 344-15

© Freescale Semiconductor, Inc., 2007-2008. All rights reserved.

MPX10GP
CASE 344B-01

MPX10DP
CASE 344C-01

Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic

Symbol

Min

Typ

Max

Units

POP

0

—

10

kPaVS

—

3.0

6.0

VDC

IO

—

6.0

—

mAdc

Full Scale Span(3)

VFSS

20

35

50

mV

Offset(4)

VOFF

0

20

35

mV

Sensitivity

ΔV/ΔΡ

—

3.5

—

mV/kPa

Linearity

—

–1.0

—

1.0

%VFSS

Pressure Hysteresis (0 to 10 kPa)

—

—

±0.1

—

%VFSS

Temperature Hysteresis

—

—

±0.5

—

%VFSS

TemperatureCoefficient of Full Scale Span

TCVFSS

–0.22

—

–0.16

%VFSS/°C

Temperature Coefficient of Offset

TCVOFF

—

±15

—

µV/°C

TCR

0.21

—

0.27

%ZIN/°C

ZIN

400

—

550

Ω

ZOUT

750

—

1250

Ω

Response Time(5) (10% to 90%)

tR

—

1.0

—

ms

Warm-Up Time(6)

—

—

20

—

ms

—

—

±0.5

—

%VFSSDifferential Pressure Range
Supply

(1)

Voltage(2)

Supply Current

Temperature Coefficient of Resistance
Input Impedance
Output Impedance

Offset

Stability(7)

1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self-heating.3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (VOFF) is defined as the output voltage at the minimum rated pressure.
5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to aspecified step change in pressure.
6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

MPX10
2

Sensors
Freescale Semiconductor

Pressure
Maximum Ratings
Table 2....