Brooks

Data Sheet DS-PR-5866E-5866M-PC-eng November, 2008

Brooks® Models 5866E & 5866M

Brooks® Models 5866E & 5866M
Elastomer and Metal Seal Pressure Controllers

Model 5866E Elastomer SealPressure Controller

Model 5866M Metal Seal Pressure Controller

GENERAL FEATURES • Integral pressure transducer • Electropolished wetted surfaces (optional) • High accuracy • High leak integrity •Suitable for upstream or downstream control • Normally closed valve (normally open valve optional) • Current or voltage signal • External valve control capability • Electrically activated valve override •Wide range of full scale pressures • Eliminates droop, hysteresis and boost

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Brooks® Models 5866E & 5866M
DESCRIPTION The Brooks® Model 5866 Series Pressure Controllers accurately measure andcontrol upstream or downstream pressure. The heart of the system is a solid state pressure transducer which produces an electrical output proportional to pressure. This signal is used to operate theintegral control valve and to provide an output signal. SPECIFICATIONS Flow Ranges* Any range from 0 to 3 sccm up to 0 to 30,000 sccm N2 *Standard pressure and temperature in accordance with SEMI(Semiconductor Equipment and Materials Institute) standard: 0°C and 101 kPa (760 torr). Pressure Ranges 7.25 psia to 1450 psia full scale (Elastomer Seal) 7.25 psia to 72.5 psia full scale (Metal Seal)Control Range 20 to 1 Options Accuracy ±0.5% full scale including linearity and hysteresis Repeatability ±0.1% full scale Pressure Ratings Maximum design: 1450 psia Maximum transducer: 21.75 psia for0-14.5 psia full scale 108.5 psia for 14.5-72.5 psia full scale 435 psia for 72.5-290 psia full scale 1450 psia for 290-1450 psia full scale (PED) Pressure Equipment Directive (97/23/EC) as SoundEngineering Practice (SEP). Leak Integrity, Inboard to Outboard 1 x 10-9 atm cc/sec Helium max. (Elastomer Seal) 1 x 10-10 atm cc/sec Helium max. (Metal Seal) Temperature Coefficient 0.1% full scale/°C...