Sensor De Presion

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

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100 kPa Uncompensated Silicon Pressure Sensors
The MPX100 series device is a silicon piezoresistive pressure sensor providing a very accurate and linear voltage output — directly proportional to the applied pressure. This standard, low cost, uncompensated sensor permits manufacturers to design and add their ownexternal temperature compensating and signal conditioning networks. Compensation techniques are simplified because of the predictability of Motorola’s single element strain gauge design. Features • Low Cost • Patented, Silicon Shear Stress Strain Gauge Design • Easy to Use Chip Carrier Package Options • Ratiometric to Supply Voltage • 60 mV Span (Typ) • Absolute, Differential and Gauge Options • ± 0.25%Linearity (Max) Application Examples • Pump/Motor Controllers • Robotics • Level Indicators • Medical Diagnostics • Pressure Switching • Barometers • Altimeters Figure 1 illustrates a schematic of the internal circuitry on the stand–alone pressure sensor chip.
PIN 3 + VS PIN 2 + Vout X–ducer PIN 4 – Vout PIN 1

MPX100 SERIES
0 to 100 kPa (0 – 14.5 psi) 60 mV FULL SCALE SPAN (TYPICAL)

BASICCHIP CARRIER ELEMENT CASE 344–15, STYLE 1

DIFFERENTIAL PORT OPTION CASE 344C–01, STYLE 1 NOTE: Pin 1 is the notched pin.

PIN NUMBER
1 2 Gnd +Vout 3 4 VS –Vout

Figure 1. Uncompensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the X–ducer is directly proportional to the differential pressure applied. The absolutesensor has a built–in reference vacuum. The output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (P1) side. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative tothe pressure (P1) side.
X–ducer is a trademark of Motorola, Inc. REV 6

Motorola Sensor Device Data © Motorola, Inc. 1998

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MPX100 SERIES
MAXIMUM RATINGS
Rating Overpressure(8) (P1 > P2) Burst Pressure(8) (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Pburst Tstg TA Value 200 1000 – 40 to +125 – 40 to +125 Unit kPa kPa °C °C

OPERATING CHARACTERISTICS (VS = 3.0 Vdc, TA= 25°C unless otherwise noted, P1 > P2)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) (0 to 100 kPa) Temperature Hysteresis(5) (– 40°C to +125°C) Temperature Coefficient of Full Scale Span(6) Temperature Coefficient of Offset(5) Temperature Coefficient of Resistance(5) Input Impedance OutputImpedance Response Time(6) (10% to 90%) Warm–Up Offset Stability(9) Symbol POP VS Io VFSS Voff ∆V/∆P — — — TCVFSS TCVoff TCR Zin Zout tR — — Min 0 — — 45 0 — – 0.25 — — – 0.22 — 0.21 400 750 — — — Typ — 3.0 6.0 60 20 0.6 — ± 0.1 ± 0.5 — ±15 — — — 1.0 20 ± 0.5 Max 100 6.0 — 90 35 — 0.25 — — – 0.16 — 0.27 550 1875 — — — Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS/°C µV/°C %Zin/°C Ω Ω ms ms %VFSSMECHANICAL CHARACTERISTICS
Characteristic Weight (Basic Element Case 344–15) Common Mode Line Pressure(7) Symbol — — Min — — Typ 2.0 — Max — 690 Unit Grams kPa

NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self–heating. 3.Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: • Linearity: Output deviation from a straight line relationship with pressure, using end point...